Temperature control of micro heater using Pt thin film temperature sensor embedded in micro gas sensor
نویسندگان
چکیده
منابع مشابه
Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor
Fabrice F.C. Duval a,∗, Stephen A. Wilson a, Graham Ensell b, Nicolas M.P. Evanno c, Markys G. Cain d, Roger W. Whatmore a,1 a School of Industrial and Manufacturing Science, Cranfield University, Bedfordshire MK43 0AL, UK b INNOS Limited, Mountbatten Building, Highfield, Southampton, Hampshire SO17 1BJ, UK c Rolls-Royce Plc, Strategic Research Centre, Sina-28, P.O. Box 31, Derby DE24 8BJ, UK d...
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ژورنال
عنوان ژورنال: Micro and Nano Systems Letters
سال: 2017
ISSN: 2213-9621
DOI: 10.1186/s40486-017-0060-z